| Record ID | marc_university_of_toronto/uoft.marc:438426831:1725 |
| Source | University of Toronto |
| Download Link | /show-records/marc_university_of_toronto/uoft.marc:438426831:1725?format=raw |
LEADER: 01725cam 22003010a 4500
005 19940922144652.6
008 940922s1993 nyua b 1 eng c
020 $a0780312120 (softb.)$z0780312139 (caseb.)$z0780312147 (microf.)
050 4 $aTK7871.85$b.I217 1992
090 8 $aTK 7871.85 .I217 1993$bENGI$c1
111 20 $aIEEE/SEMI International Semiconductor Manufacturing Science Symposium.$n(5th :$d1993 :$cSan Francisco, Calif.)
245 10 $aIEEE/SEMI International Semiconductor Manufacturing Science Symposium :$bJuly 19-20, 1993, San Francisco, CA USA.
260 $aNew York, N.Y. :$bInstitute of Electrical and Electronics Engineers,$cc1993.
300 $a152 p. :$bill.
500 $a"ISMSS."
500 $a"IEEE Catalog Number 93CH3280-5."
500 $aOn cover and spine: 1993 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
500 $aCo-sponsored by Semiconductor Equipment and Materials International (SEMI), The Electron Devices Society, and the Components, Hybrids, & Manufacturing Technology (CHMT) Society.
504 $aIncludes bibliographical references.
650 0 $aSemiconductors$xDesign and construction$xCongresses.
710 20 $aSemiconductor Equipment and Materials Institute.
710 20 $aIEEE Components, Hybrids, and Manufacturing Technology Society.
710 20 $aIEEE Electron Devices Society.
740 01 $aISMSS.
740 01 $a1993 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
740 01 $a1993 Proceedings, International Semiconductor Manufacturing Science Symposium (ISMSS)
948 $a09/22/1994$b04/17/1999
949 $aTK7871.85 .I217 1993$wLC$c1$i31761040268500$d27/11/1997$lSTACKS$mENGI_CSCI$n1$q1$rY$sY$tBOOK$u13/10/1994