An edition of Microsystems engineering (2003)

Microsystems engineering

metrology and inspection III : 23-25 June, 2003, Munich, Germany

by

Cover of: Microsystems engineering by Christophe Gorecki
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Last edited by ImportBot
August 1, 2020 | History
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An edition of Microsystems engineering (2003)

Microsystems engineering

metrology and inspection III : 23-25 June, 2003, Munich, Germany

by

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Publish Date
Publisher
SPIE
Language
English
Pages
210

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Previews available in: English

Subjects

Microelectromechanical systems, Mensuration, Industrial applications, Microelectronics, Optical methods, Quality control, Congresses, Optical detectors, Interferometry, Measurement, Electromechanical devices
Edition Availability
Cover of: Microsystems engineering
Microsystems engineering: metrology and inspection III : 23-25 June 2003, Munich, Germany
2004, SPIE
in English
Cover of: Microsystems engineering
Microsystems engineering: metrology and inspection III : 23-25 June, 2003, Munich, Germany
2003, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 5145, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5145.
Genre
Congresses.
Other Titles
Metrology and inspection

Classifications

Dewey Decimal Class
620/.0044
Library of Congress
TS156.2 .M53 2003, TS156.2.M53 2003

The Physical Object

Pagination
ix, 210 p. :
Number of pages
210

Edition Identifiers

Open Library
OL3317891M
ISBN 10
0819450154
LCCN
2004267084
OCLC/WorldCat
53244711
Goodreads
3568750

Work Identifiers

Work ID
OL18301874W

Source records

Scriblio MARC record
Library of Congress MARC record
University of Toronto MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record
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History

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August 1, 2020 Edited by ImportBot import existing book
February 11, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book