Surface scattering and diffraction for advanced metrology II

9 July, 2002, Seattle, Washington, USA

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Last edited by MARC Bot
December 8, 2020 | History

Surface scattering and diffraction for advanced metrology II

9 July, 2002, Seattle, Washington, USA

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Publish Date
Publisher
SPIE
Language
English
Pages
186

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Previews available in: English

Book Details


Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Washington
Series
SPIE proceedings series ;, v. 4780, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4780.
Genre
Congresses.

Classifications

Dewey Decimal Class
620/.44
Library of Congress
TA418.7 .S929 2002, TA418.7.S929 2002

The Physical Object

Pagination
vii, 186 p. :
Number of pages
186

Edition Identifiers

Open Library
OL3774869M
ISBN 10
0819445479
LCCN
2003535276
OCLC/WorldCat
51110642
Goodreads
5003878

Work Identifiers

Work ID
OL20993808W

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December 8, 2020 Edited by MARC Bot import existing book
August 1, 2020 Created by ImportBot import existing book