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Publish Date
September 1994
Publisher
Electrochemical Society, Incorporated
Language
English
Pages
620
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Subjects
Semiconductors, Etching, Congresses, Plasma etchingEdition | Availability |
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1
Proceedings of the Tenth Symposium on Plasma Processing
September 1994, Electrochemical Society, Incorporated
Paperback
in English
1566770777 9781566770774
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July 18, 2024 | Edited by MARC Bot | import existing book |
April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
December 10, 2009 | Created by WorkBot | add works page |