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Last edited by Open Library Bot
April 13, 2010 | History
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Edition | Availability |
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1
IEEE/SEMI International Semiconductor Manufacturing Science Symposium: July 19-20, 1993, San Francisco, CA USA.
1993, Institute of Electrical and Electronics Engineers
in English
0780312120 9780780312128
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2
Ieee/Semi International Semiconductor Manufacturing Science Symposium: July 19-20, 1993 San Francisco, Ca Usa/93Ch3280-5
December 1993, Institute of Electrical & Electronics Enginee
Paperback
in English
0780312120 9780780312128
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zzzz
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Book Details
Edition Notes
"ISMSS."
"IEEE Catalog Number 93CH3280-5."
On cover and spine: 1993 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
Co-sponsored by Semiconductor Equipment and Materials International (SEMI), The Electron Devices Society, and the Components, Hybrids, & Manufacturing Technology (CHMT) Society.
Includes bibliographical references.
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History
- Created November 2, 2008
- 3 revisions
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April 13, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
December 15, 2009 | Edited by WorkBot | link works |
November 2, 2008 | Created by ImportBot | Imported from University of Toronto MARC record |